- 专利标题: Indirect readout FET
-
申请号: US15585876申请日: 2017-05-03
-
公开(公告)号: US10332874B2公开(公告)日: 2019-06-25
- 发明人: Jin-Ping Han , Yulong Li , Dennis M. Newns , Paul M. Solomon , Xiao Sun
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Tutunjian & Bitetto, P.C.
- 代理商 Vazken Alexanian
- 主分类号: H01L29/772
- IPC分类号: H01L29/772 ; H01L27/06 ; H01L29/51 ; H01L29/49 ; H01L29/06
摘要:
A metal-insulator-metal (MIM) capacitor structure includes source and drain regions formed within a semiconductor substrate, a first conducting layer formed over the source and drain regions, and a dielectric layer formed over the first conducting layer. The MIM capacitor structure further includes a second conducting layer formed over the dielectric layer, and a sidewall dielectric formed adjacent the first conducting layer and the dielectric layer. An electric field is created indirectly through the sidewall dielectric to an adjacent field effect transistor (FET) channel in the semiconductor substrate.
公开/授权文献
- US20180323188A1 INDIRECT READOUT FET 公开/授权日:2018-11-08
信息查询
IPC分类: