- 专利标题: Three-dimensional memory device containing multi-threshold-voltage drain select gates and method of making the same
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申请号: US15850073申请日: 2017-12-21
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公开(公告)号: US10347647B1公开(公告)日: 2019-07-09
- 发明人: Naohiro Hosoda , Keisuke Shigemura , Junichi Ariyoshi , Kazuki Kajitani , Yuji Fukano
- 申请人: SANDISK TECHNOLOGIES LLC
- 申请人地址: US TX Addison
- 专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人地址: US TX Addison
- 代理机构: The Marbury Law Group PLLC
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L27/11556 ; H01L27/11519 ; H01L27/11565 ; H01L27/11582 ; H01L27/1157 ; H01L21/265 ; H01L21/266 ; H01L27/11524 ; H01L29/40
摘要:
A memory device contains a stack of insulating layers and electrically conductive word line layers, at least one first drain select gate electrode located over the stack and extending through a first drain select transistor and a second drain select transistor, at least one second drain select gate electrode located between the first drain select electrode and the stack, and extending through a third drain select transistor and a fourth drain select transistor. The first drain select transistor and the third drain select transistor are located in a first NAND memory string. The second drain select transistor and the fourth drain select transistor are located in a second NAND memory string different from the first NAND memory string. The first drain select transistor has a higher threshold voltage than the second drain select transistor. The third drain select transistor has a lower threshold voltage than the fourth drain select transistor.
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