Invention Grant
- Patent Title: Long channels for transistors
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Application No.: US15844950Application Date: 2017-12-18
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Publication No.: US10355103B2Publication Date: 2019-07-16
- Inventor: Robin Hsin Kuo Chao , Choonghyun Lee , Heng Wu , Chun Wing Yeung , Jingyun Zhang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/10 ; H01L21/8234 ; H01L21/306 ; H01L29/423

Abstract:
A semiconductor device includes a first nanosheet stack, a second nanosheet stack, and a third nanosheet stack arranged on a substrate. The semiconductor device includes a gate arranged on the first nanosheet stack, the second nanosheet stack, and the third nanosheet stack. The semiconductor device includes a channel extending through the gate and from the first nanosheet stack, the second nanosheet stack, and to the third nanosheet stack in a serpentine fashion. The semiconductor device includes a first source/drain and a second source/drain arranged on opposing sides of the gate.
Public/Granted literature
- US20190189776A1 LONG CHANNELS FOR TRANSISTORS Public/Granted day:2019-06-20
Information query
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