Invention Grant
- Patent Title: Memory device and fabrication method thereof
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Application No.: US15811405Application Date: 2017-11-13
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Publication No.: US10355198B2Publication Date: 2019-07-16
- Inventor: Wei-Hao Liao , Chih-Wei Lu , Hsi-Wen Tien , Pin-Ren Dai , Chung-Ju Lee
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L27/22 ; H01L43/12 ; H01L43/08

Abstract:
A memory device includes an MTJ structure and a first metal residue. The MTJ structure includes a top surface having a first width, a bottom surface having a second width greater than the first width, and a stepped sidewall structure between the top surface and the bottom surface. The stepped sidewall structure includes a first sidewall, a second sidewall, and an intermediary surface connecting the first sidewall to the second sidewall. The first metal residue is in contact with the first sidewall and not in contact with the second sidewall.
Public/Granted literature
- US20190148623A1 MEMORY DEVICE AND FABRICATION METHOD THEREOF Public/Granted day:2019-05-16
Information query
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