Invention Grant
- Patent Title: Compact device structures for a bipolar junction transistor
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Application No.: US15081443Application Date: 2016-03-25
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Publication No.: US10367083B2Publication Date: 2019-07-30
- Inventor: Vibhor Jain , Renata Camillo-Castillo , Qizhi Liu , John J. Pekarik , Alvin J. Joseph , Peter B. Gray
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L29/732
- IPC: H01L29/732 ; H01L29/06 ; H01L29/10 ; H01L29/08 ; H01L29/417 ; H01L21/762 ; H01L29/73

Abstract:
Device structures for a bipolar junction transistor and methods for fabricating a device structure using a substrate. One or more primary trench isolation regions are formed that surround an active device region of the substrate and a collector contact region of the substrate. A base layer is formed on the active device region and the collector contact region, and the active device region includes a collector. Each primary trench isolation region extends vertically to a first depth into the substrate. A trench is formed laterally located between the base layer and the collector contact region and that extends vertically through the base layer and into the substrate to a second depth that is less than the first depth. A dielectric is formed in the trench to form a secondary trench isolation region. An emitter is formed on the base layer.
Public/Granted literature
- US20170278955A1 COMPACT DEVICE STRUCTURES FOR A BIPOLAR JUNCTION TRANSISTOR Public/Granted day:2017-09-28
Information query
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