Invention Grant
- Patent Title: Tool auto-teach method and apparatus
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Application No.: US16011978Application Date: 2018-06-19
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Publication No.: US10381252B2Publication Date: 2019-08-13
- Inventor: Jairo T. Moura , Aaron Gawlik , Reza Saeidpourazar
- Applicant: Brooks Automation, Inc.
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67 ; H01L21/68 ; H01L21/687

Abstract:
A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.
Public/Granted literature
- US20190027389A1 TOOL AUTO-TEACH METHOD AND APPARATUS Public/Granted day:2019-01-24
Information query
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