公开(公告)号：US10381252B2

公开(公告)日：2019-08-13

申请号：US16011978

申请日：2018-06-19

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. Moura ,  Aaron Gawlik ,  Reza Saeidpourazar

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/68 ,  H01L21/687

Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.

公开(公告)号：US20210098276A1

公开(公告)日：2021-04-01

申请号：US17014575

申请日：2020-09-08

Applicant: Brooks Automation, Inc.

Inventor： Jairo T Moura ,  Aaron Gawlik ,  Reza Saeidpourazar

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/68 ,  H01L21/687

Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.

公开(公告)号：US10002781B2

公开(公告)日：2018-06-19

申请号：US14937676

申请日：2015-11-10

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. Moura ,  Aaron Gawlik ,  Reza Saeidpourazar

IPC: G06F19/00 ,  H01L21/677 ,  H01L21/67 ,  H01L21/68 ,  H01L21/687

CPC classification number: H01L21/67742 ,  H01L21/67265 ,  H01L21/67294 ,  H01L21/67766 ,  H01L21/67778 ,  H01L21/68 ,  H01L21/68707

Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.

公开(公告)号：US11469126B2

公开(公告)日：2022-10-11

申请号：US17014575

申请日：2020-09-08

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. Moura ,  Aaron Gawlik ,  Reza Saeidpourazar

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/68 ,  H01L21/687

Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.

公开(公告)号：US10770325B2

公开(公告)日：2020-09-08

申请号：US16539819

申请日：2019-08-13

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. Moura ,  Aaron Gawlik ,  Reza Saeidpourazar

IPC: H01L21/06 ,  H01L21/677 ,  H01L21/67 ,  H01L21/68 ,  H01L21/687

Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.

公开(公告)号：US10742092B2

公开(公告)日：2020-08-11

申请号：US14540058

申请日：2014-11-13

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. Moura ,  Reza Saeidpourazar ,  Branden Gunn ,  Matthew W. Coady ,  Ulysses Gilchrist

IPC: H02K11/215 ,  H01L21/687 ,  H02K1/14 ,  H01L21/677 ,  H02K5/128 ,  H02K1/24 ,  H01L21/67

Abstract: A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive, where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, at least one seal partition configured to isolate the isolated environment, and at least one sensor including a magnetic sensor member connected to the housing, at least one sensor track connected to the at least one rotor where the at least one seal partition is disposed between and separates the magnetic sensor member and the at least one sensor track so that the at least one sensor track is disposed in the isolated environment and the magnetic sensor member is disposed outside the isolated environment.