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公开(公告)号：US11338437B2
公开(公告)日：2022-05-24
申请号：US17103243
申请日：2020-11-24
Applicant: BROOKS AUTOMATION, INC.
Inventor： Aaron Gawlik , Jairo T. Moura
Abstract: A method for health assessment of a system including a transport apparatus including registering predetermined operating data embodying at least one dynamic performance variable output by the transport apparatus, determining a base value (CpkBase) characterized by a probability density function of each of the dynamic performance variable output, resolving from the transport apparatus in situ process motion commands of the apparatus controller and defining another predetermined motion set of the transport apparatus, registering predetermined operating data embodying the at least one dynamic performance variable output by the transport apparatus and determining with the processor another value (CpkOther) characterized by the probability density function of each of the dynamic performance variable output by the transport apparatus, and comparing the other value and the base value (CpkBase) for each of the dynamic performance variable output by the transport apparatus respectively corresponding to the predetermined motion base set and the other predetermined motion set.
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公开(公告)号：US20210098276A1
公开(公告)日：2021-04-01
申请号：US17014575
申请日：2020-09-08
Applicant: Brooks Automation, Inc.
Inventor： Jairo T Moura , Aaron Gawlik , Reza Saeidpourazar
IPC: H01L21/677 , H01L21/67 , H01L21/68 , H01L21/687
Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.
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公开(公告)号：US10002781B2
公开(公告)日：2018-06-19
申请号：US14937676
申请日：2015-11-10
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Aaron Gawlik , Reza Saeidpourazar
IPC: G06F19/00 , H01L21/677 , H01L21/67 , H01L21/68 , H01L21/687
CPC classification number: H01L21/67742 , H01L21/67265 , H01L21/67294 , H01L21/67766 , H01L21/67778 , H01L21/68 , H01L21/68707
Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.
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公开(公告)号：US10770325B2
公开(公告)日：2020-09-08
申请号：US16539819
申请日：2019-08-13
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Aaron Gawlik , Reza Saeidpourazar
IPC: H01L21/06 , H01L21/677 , H01L21/67 , H01L21/68 , H01L21/687
Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.
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公开(公告)号：US10564221B2
公开(公告)日：2020-02-18
申请号：US14540077
申请日：2014-11-13
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Nathan Spiker , Aaron Gawlik , Jayaraman Krishnasamy
Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.
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Patent Agency Ranking
公开(公告)号：US11469126B2
公开(公告)日：2022-10-11
申请号：US17014575
申请日：2020-09-08
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Aaron Gawlik , Reza Saeidpourazar
IPC: H01L21/677 , H01L21/67 , H01L21/68 , H01L21/687
Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.
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公开(公告)号：US11181582B2
公开(公告)日：2021-11-23
申请号：US16793623
申请日：2020-02-18
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Nathan Spiker , Aaron Gawlik , Jayaraman Krishnasamy
Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.
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公开(公告)号：US10978330B2
公开(公告)日：2021-04-13
申请号：US16197087
申请日：2018-11-20
Applicant: BROOKS AUTOMATION, INC.
Inventor： Bing Yin , Jairo T. Moura , Vincent Tsang , Aaron Gawlik , Nathan Spiker
IPC: G06F17/00 , H01L21/68 , H01L21/687
Abstract: A Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.
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公开(公告)号：US11821953B2
公开(公告)日：2023-11-21
申请号：US17534179
申请日：2021-11-23
Applicant: Brooks Automation, Inc.
Inventor： Jairo T Moura , Nathan Spiker , Aaron Gawlik , Jayaraman Krishnasamy
CPC classification number: G01R31/34 , G01L3/22 , H02P6/10 , H02P23/0031 , H02P23/12 , H02P25/098
Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.
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公开(公告)号：US11776834B2
公开(公告)日：2023-10-03
申请号：US17229495
申请日：2021-04-13
Applicant: BROOKS AUTOMATION, INC.
Inventor： Bing Yin , Jairo Moura , Vincent Tsang , Aaron Gawlik , Nathan Spiker
IPC: G06F17/00 , H01L21/68 , H01L21/687
CPC classification number: H01L21/68 , H01L21/68707
Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.
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