Invention Grant
- Patent Title: Semiconductor devices including a dummy gate structure on a fin
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Application No.: US16115711Application Date: 2018-08-29
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Publication No.: US10446561B2Publication Date: 2019-10-15
- Inventor: Sang-Jine Park , Kee-Sang Kwon , Do-Hyoung Kim , Bo-Un Yoon , Keun-Hee Bai , Kwang-Yong Yang , Kyoung-Hwan Yeo , Yong-Ho Jeon
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2014-0054924 20140508
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/088 ; H01L29/06 ; H01L21/8234 ; H01L27/092 ; H01L29/08 ; H01L29/16 ; H01L29/161 ; H01L29/165 ; H01L29/78 ; H01L21/762

Abstract:
Semiconductor devices including a dummy gate structure on a fin are provided. A semiconductor device includes a fin protruding from a substrate. The semiconductor device includes a source/drain region in the fin, and a recess region of the fin that is between first and second portions of the source/drain region. Moreover, the semiconductor device includes a dummy gate structure overlapping the recess region, and a spacer that is on the fin and adjacent a sidewall of the dummy gate structure.
Public/Granted literature
- US20180374859A1 SEMICONDUCTOR DEVICES INCLUDING A DUMMY GATE STRUCTURE ON A FIN Public/Granted day:2018-12-27
Information query
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