Invention Grant
- Patent Title: Integrated photo-acoustic gas sensor module
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Application No.: US15349438Application Date: 2016-11-11
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Publication No.: US10451543B2Publication Date: 2019-10-22
- Inventor: Thomas Mueller , Horst Theuss , Klaus Elian , Rainer Markus Schaller , Stefan Kolb
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Dicke, Billig & Czaja PLLC
- Priority: DE102016101148 20160122; DE102016103646 20160301
- Main IPC: G01N21/17
- IPC: G01N21/17 ; A61B5/00 ; G01N29/032 ; G01N29/22 ; G01N29/24 ; G01N29/48 ; G01N33/00

Abstract:
A photo-acoustic gas sensor is disclosed. The photo-acoustic gas sensor includes a substrate, a light emitter unit supported by the substrate, the light emitter unit including a light emitter configured to emit a beam of light pulses with a predetermined repetition frequency and wavelength corresponding to an absorption band of a gas to be sensed, and a detector unit supported by the substrate, the detector unit including a microphone, wherein the beam of light pulses traverses an area intended to accommodate the gas and the microphone can receive a signal oscillating with the repetition frequency.
Public/Granted literature
- US20170212036A1 INTEGRATED PHOTO-ACOUSTIC GAS SENSOR MODULE Public/Granted day:2017-07-27
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