Invention Grant
- Patent Title: Method of manufacturing a magnetoresistive stack/ structure using plurality of encapsulation layers
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Application No.: US15337123Application Date: 2016-10-28
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Publication No.: US10483460B2Publication Date: 2019-11-19
- Inventor: Kerry Joseph Nagel , Wenchin Lin , Sarin A. Deshpande , Jijun Sun , Sanjeev Aggarwal , Chaitanya Mudivarthi
- Applicant: Everspin Technologies, Inc.
- Applicant Address: US AZ Chandler
- Assignee: Everspin Technologies, Inc.
- Current Assignee: Everspin Technologies, Inc.
- Current Assignee Address: US AZ Chandler
- Agency: Bookoff McAndrews, PLLC
- Main IPC: H01L43/12
- IPC: H01L43/12 ; G11C11/16 ; H01L43/08

Abstract:
A method of manufacturing a magnetoresistive stack/structure comprising etching through a second magnetic region to (i) provide sidewalls of the second magnetic region and (ii) expose a surface of a dielectric layer; depositing a first encapsulation layer on the sidewalls of the second magnetic region and over the dielectric layer; etching the first encapsulation layer which is disposed over the exposed surface of the dielectric layer. The method further includes (a) depositing a second encapsulation layer: (i) on the first encapsulation layer disposed on the sidewalls of the second magnetic region and (ii) over the exposed surface of the dielectric layer and (b) depositing a third encapsulation layer: (i) on the second encapsulation layer which is on the first encapsulation layer and the exposed surface of the dielectric layer. The method also includes etching the remaining layers of the stack/structure (via one or more etch processes).
Public/Granted literature
- US20170125663A1 Method of Manufacturing a Magnetoresistive Stack/ Structure using Plurality of Encapsulation Layers Public/Granted day:2017-05-04
Information query
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