Invention Grant
- Patent Title: Photocathode designs and methods of generating an electron beam using a photocathode
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Application No.: US16150399Application Date: 2018-10-03
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Publication No.: US10535493B2Publication Date: 2020-01-14
- Inventor: Katerina Ioakeimidi , Gildardo R. Delgado , Michael E. Romero , Frances Hill , Rudy F. Garcia
- Applicant: KLA-TENCOR CORPORATION
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Hodgson Russ LLP
- Main IPC: H01J19/24
- IPC: H01J19/24 ; H01J37/073 ; H01J37/26 ; G02B27/09 ; H01J40/06 ; H01J40/18 ; H01J1/304 ; H01J37/06 ; H01J37/28 ; H01J1/34 ; H01L21/67
Abstract:
A photocathode can include a body fabricated of a wide bandgap semiconductor material, a metal layer, and an alkali halide photocathode emitter. The body may have a thickness of less than 100 nm and the alkali halide photocathode may have a thickness less than 10 nm. The photocathode can be illuminated with a dual wavelength scheme.
Public/Granted literature
- US20190108964A1 PHOTOCATHODE DESIGNS AND METHODS OF GENERATING AN ELECTRON BEAM USING A PHOTOCATHODE Public/Granted day:2019-04-11
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