Invention Grant
- Patent Title: Forming stacked nanowire semiconductor device
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Application No.: US16031142Application Date: 2018-07-10
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Publication No.: US10541330B2Publication Date: 2020-01-21
- Inventor: Kangguo Cheng , Xin Miao , Peng Xu , Chen Zhang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/06 ; H01L29/10 ; H01L27/112 ; H01L27/24 ; H01L29/08

Abstract:
A method of making a vertical transistor device includes forming a front gate and a back gate opposite a major surface of a substrate. The front gate and the back gate are symmetric and arranged on opposing sides of a channel between the front gate and the back gate. The channel extends from a drain to a source. The method includes disposing a mask to cover the front gate and removing the back gate. The method further includes replacing the back gate with a layer of insulator and another back gate stack. The another back gate stack only covers a junction between the channel and the source, and remaining portions of the back gate are the layer of insulator.
Public/Granted literature
- US20180331214A1 FORMING STACKED NANOWIRE SEMICONDUCTOR DEVICE Public/Granted day:2018-11-15
Information query
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