Invention Grant
- Patent Title: Silicon photonics integration method and structure
-
Application No.: US15980014Application Date: 2018-05-15
-
Publication No.: US10546962B2Publication Date: 2020-01-28
- Inventor: Solomon Assefa , Tymon Barwicz , William M. Green , Marwan H. Khater , Jessie C. Rosenberg , Steven M. Shank
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Steven Meyers; Andrew M. Calderon
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L31/0203 ; H01L31/0216 ; H01L31/18 ; H01L27/144 ; G02B6/12 ; H01L21/3205 ; H01L31/0232 ; G02B6/42 ; H01L31/02 ; H01L31/153 ; H01L21/84 ; H01L49/02

Abstract:
Approaches for silicon photonics integration are provided. A method includes: forming at least one encapsulating layer over and around a photodetector; thermally crystallizing the photodetector material after the forming the at least one encapsulating layer; and after the thermally crystallizing the photodetector material, forming a conformal sealing layer on the at least one encapsulating layer and over at least one device. The conformal sealing layer is configured to seal a crack in the at least one encapsulating layer. The photodetector and the at least one device are on a same substrate. The at least one device includes a complementary metal oxide semiconductor device or a passive photonics device.
Public/Granted literature
- US20180269338A1 SILICON PHOTONICS INTEGRATION METHOD AND STRUCTURE Public/Granted day:2018-09-20
Information query
IPC分类: