Invention Grant
- Patent Title: Exhaust gas treatment apparatus
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Application No.: US16049927Application Date: 2018-07-31
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Publication No.: US10557631B2Publication Date: 2020-02-11
- Inventor: Kazutomo Miyazaki , Tetsuo Komai , Seiji Kashiwagi
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2017-150513 20170803; JP2018-129806 20180709
- Main IPC: F23G7/06
- IPC: F23G7/06 ; F23G5/32 ; F23G5/24 ; F23G5/12

Abstract:
An exhaust gas treatment apparatus for treating an exhaust gas discharged from an EUV (Extreme Ultra Violet) exposure equipment by combustion treatment to make the exhaust gas harmless is disclosed. The exhaust gas treatment apparatus includes a cylindrical combustion chamber configured to combust a processing gas containing hydrogen, and a processing gas nozzle and an oxidizing gas nozzle provided on the combustion chamber and configured to blow the processing gas and an oxidizing gas, respectively, in a tangential direction to an inner circumferential surface of the combustion chamber, wherein the processing gas nozzle and the oxidizing gas nozzle are positioned in the same plane perpendicular to an axis of the combustion chamber.
Public/Granted literature
- US20190041058A1 EXHAUST GAS TREATMENT APPARATUS Public/Granted day:2019-02-07
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