公开(公告)号：US10557631B2

公开(公告)日：2020-02-11

申请号：US16049927

申请日：2018-07-31

Applicant: EBARA CORPORATION

Inventor： Kazutomo Miyazaki ,  Tetsuo Komai ,  Seiji Kashiwagi

IPC: F23G7/06 ,  F23G5/32 ,  F23G5/24 ,  F23G5/12

Abstract: An exhaust gas treatment apparatus for treating an exhaust gas discharged from an EUV (Extreme Ultra Violet) exposure equipment by combustion treatment to make the exhaust gas harmless is disclosed. The exhaust gas treatment apparatus includes a cylindrical combustion chamber configured to combust a processing gas containing hydrogen, and a processing gas nozzle and an oxidizing gas nozzle provided on the combustion chamber and configured to blow the processing gas and an oxidizing gas, respectively, in a tangential direction to an inner circumferential surface of the combustion chamber, wherein the processing gas nozzle and the oxidizing gas nozzle are positioned in the same plane perpendicular to an axis of the combustion chamber.

公开(公告)号：US10215407B2

公开(公告)日：2019-02-26

申请号：US15556582

申请日：2015-11-06

Applicant: Ebara Corporation

Inventor： Kazutomo Miyazaki ,  Tetsuo Komai ,  Toyoji Shinohara ,  Seiji Kashiwagi

IPC: F23G7/06 ,  F01N3/24 ,  F23L1/00 ,  F23M5/08 ,  F23C3/00

Abstract: A hybrid stepping motor has a connector housing formed integrally with an insulator having an upper insulator and a lower insulator. The hybrid stepping motor includes a stator core and output terminals concentrically disposed outside the stator core. A wiring pattern serving as the output terminals has connector pins and land portions disposed eccentrically with respect to one another. The land portions are formed on an outer edge side of the wiring pattern. A surface, which is an uppermost surface of the wiring pattern, is located below a lowermost surface, in which jumper wires and lead wires pass, of the lower insulator. The lead wires are pulled out from a lower side, and are pulled out to guiding grooves.

公开(公告)号：US09956524B2

公开(公告)日：2018-05-01

申请号：US14289575

申请日：2014-05-28

Applicant: EBARA CORPORATION

Inventor： Toshiharu Nakazawa ,  Tetsuro Sugiura ,  Kohtaro Kawamura ,  Toyoji Shinohara ,  Takashi Kyotani ,  Keiichi Ishikawa ,  Seiji Kashiwagi ,  Yasuhiko Suzuki ,  Hideo Arai

IPC: B01D53/74 ,  B01D53/00

CPC classification number: B01D53/74 ,  B01D53/005 ,  B01D2257/204 ,  B01D2257/2066 ,  B01D2257/553 ,  B01D2258/0216 ,  Y10T137/85978

Abstract: A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.

公开(公告)号：US09822974B2

公开(公告)日：2017-11-21

申请号：US14226737

申请日：2014-03-26

Applicant: EBARA CORPORATION

Inventor： Kohtaro Kawamura ,  Toyoji Shinohara ,  Tetsuro Sugiura ,  Hideo Arai ,  Toshiharu Nakazawa ,  Keiichi Ishikawa ,  Seiji Kashiwagi ,  Yasuhiko Suzuki ,  Takashi Kyotani

IPC: F23G7/06 ,  F23J13/00 ,  F04B37/14 ,  F04C25/02 ,  F23G5/32 ,  F23L17/00 ,  B01D53/68 ,  B01D53/76

CPC classification number: F23J13/00 ,  B01D53/68 ,  B01D53/76 ,  B01D2251/102 ,  B01D2257/204 ,  B01D2257/553 ,  B01D2258/0216 ,  F04B37/14 ,  F04C25/02 ,  F04C2220/30 ,  F23G5/32 ,  F23G7/065 ,  F23J2219/00 ,  F23J2900/01007 ,  F23L17/00

Abstract: A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member.

公开(公告)号：US09364786B2

公开(公告)日：2016-06-14

申请号：US14226741

申请日：2014-03-26

Applicant: EBARA CORPORATION

Inventor： Kohtaro Kawamura ,  Toyoji Shinohara ,  Tetsuro Sugiura ,  Hideo Arai ,  Takashi Kyotani ,  Toshiharu Nakazawa ,  Keiichi Ishikawa ,  Seiji Kashiwagi ,  Yasuhiko Suzuki

IPC: B01D53/34 ,  C23C16/44 ,  F23G7/06 ,  F04B37/06 ,  F04B37/14

CPC classification number: B01D53/343 ,  C23C16/4412 ,  F04B37/06 ,  F04B37/14 ,  F23G7/065 ,  Y02C20/30

Abstract: A vacuum pump has a discharge port coupled to an abatement chamber for treating an exhaust gas discharged from a chamber of a manufacturing apparatus to make the exhaust gas harmless. The vacuum pump is coupled to a heat exchanger configured to heat an inert gas by using heat generated when the exhaust gas is treated to be made harmless in the abatement part. The inert gas heated by the heat exchanger is introduced into the vacuum pump.

Abstract translation: 真空泵具有联接到减排室的排出口，用于处理从制造装置的室排出的排气，使废气无害化。 真空泵联接到热交换器，该热交换器被配置为通过使废气在减排部分被处理成无害化时产生的热量来加热惰性气体。 由热交换器加热的惰性气体被引入真空泵。

公开(公告)号：US10920981B2

公开(公告)日：2021-02-16

申请号：US16326251

申请日：2017-08-18

Applicant: EBARA CORPORATION

Inventor： Kazutomo Miyazaki ,  Tetsuo Komai ,  Seiji Kashiwagi ,  Kazumasa Hosotani ,  Takeshi Eda

IPC: C10L10/00 ,  F23G7/06 ,  F23D14/24 ,  F23D14/20 ,  F23D14/50 ,  F23D14/62 ,  F23G5/12 ,  F23D14/32

Abstract: A burner head that constitutes a combustion chamber for an exhaust gas processing apparatus by being attached to an upper portion of a combustion chamber main body is provided. The burner head includes a chassis which has a cylindrical portion having a lower opening and in which a fastening module for removably fastening to the combustion chamber main body is provided, a fuel nozzle that blows fuel into the cylindrical portion, a combustion supporting gas nozzle that blows combustion supporting gas into the cylindrical portion, a processing gas nozzle that blows processing gas into the cylindrical portion, and a pilot burner that ignites the fuel and/or the combustion supporting gas.

公开(公告)号：US10143964B2

公开(公告)日：2018-12-04

申请号：US14284305

申请日：2014-05-21

Applicant: EBARA CORPORATION

Inventor： Kohtaro Kawamura ,  Toyoji Shinohara ,  Tetsuro Sugiura ,  Hideo Arai ,  Takashi Kyotani ,  Toshiharu Nakazawa ,  Keiichi Ishikawa ,  Seiji Kashiwagi ,  Yasuhiko Suzuki

IPC: B01D53/74 ,  B01D53/70 ,  B01D53/92 ,  F04B37/06 ,  F04B37/14 ,  B01D53/04 ,  B01D53/68 ,  B01D53/86

Abstract: A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which at least one abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The abatement part is selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas and/or different treatment performances of exhaust gas.