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公开(公告)号：US10086413B2
公开(公告)日：2018-10-02
申请号：US14302724
申请日：2014-06-12
Applicant: EBARA CORPORATION
Inventor： Kazutomo Miyazaki , Hiroshi Ikeda
Abstract: A powder discharge system is installed in a circulating water tank for collecting powder generated when an exhaust gas is treated in an exhaust gas treatment apparatus. The powder discharge system includes at least one eductor provided in the circulating water tank. The eductor has a nozzle configured to throttle a flow of water supplied from a pump for pumping water in the circulating water tank, a suction port configured to suck water in the circulating water tank into the eductor by utilizing a reduction of pressure generated when the flow of water is throttled by the nozzle, and a discharge port configured to eject the water sucked from the suction port together with the water discharged from the nozzle toward a bottom of the circulating water tank.
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公开(公告)号：US11527422B2
公开(公告)日：2022-12-13
申请号：US16983285
申请日：2020-08-03
Applicant: EBARA CORPORATION
Inventor： Takafumi Sekine , Takanori Inada , Kazutomo Miyazaki , Naoya Hanafusa
Abstract: There is provided an exhaust gas processing apparatus configured to cause a processing gas to be exposed to or come into contact with a liquid and thereby detoxify the processing gas. The exhaust gas processing apparatus comprises a suction casing provided with an inlet which the processing gas is sucked into and with an outlet which the processing gas is flowed out from; a liquid tank configured to receive an outlet-side part of the suction casing and store the liquid therein; and one or multiple spray nozzles placed in the liquid tank. The outlet of the suction casing is arranged to be located above a liquid surface of the liquid stored in the liquid tank. The one or multiple spray nozzles are configured to spray the liquid from around the outlet of the suction casing to a peripheral part of the outlet.
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公开(公告)号：US10215407B2
公开(公告)日：2019-02-26
申请号：US15556582
申请日：2015-11-06
Applicant: Ebara Corporation
Inventor： Kazutomo Miyazaki , Tetsuo Komai , Toyoji Shinohara , Seiji Kashiwagi
Abstract: A hybrid stepping motor has a connector housing formed integrally with an insulator having an upper insulator and a lower insulator. The hybrid stepping motor includes a stator core and output terminals concentrically disposed outside the stator core. A wiring pattern serving as the output terminals has connector pins and land portions disposed eccentrically with respect to one another. The land portions are formed on an outer edge side of the wiring pattern. A surface, which is an uppermost surface of the wiring pattern, is located below a lowermost surface, in which jumper wires and lead wires pass, of the lower insulator. The lead wires are pulled out from a lower side, and are pulled out to guiding grooves.
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公开(公告)号：US20140366958A1
公开(公告)日：2014-12-18
申请号：US14302724
申请日：2014-06-12
Applicant: EBARA CORPORATION
Inventor： Kazutomo Miyazaki , Hiroshi Ikeda
IPC: B08B9/093
CPC classification number: B08B9/0933 , F23D2900/00002 , F23J15/04 , F23J15/06 , F23J2217/50 , F23J2217/60 , F23J2219/70 , F23J2219/80 , Y10T137/4259
Abstract: A powder discharge system is installed in a circulating water tank for collecting powder generated when an exhaust gas is treated in an exhaust gas treatment apparatus. The powder discharge system includes at least one eductor provided in the circulating water tank. The eductor has a nozzle configured to throttle a flow of water supplied from a pump for pumping water in the circulating water tank, a suction port configured to suck water in the circulating water tank into the eductor by utilizing a reduction of pressure generated when the flow of water is throttled by the nozzle, and a discharge port configured to eject the water sucked from the suction port together with the water discharged from the nozzle toward a bottom of the circulating water tank.
Abstract translation: 粉末排出系统安装在循环水箱中，用于收集在废气处理装置中处理废气时产生的粉末。 粉末排出系统包括设置在循环水箱中的至少一个喷射器。 喷射器具有喷嘴，该喷嘴构造成节流从供水泵送水循环水箱中的水流;吸入口构造成通过利用在流动时产生的压力的降低将循环水箱中的水吸入喷射器 的水被喷嘴节流，并且排出口构造成将从吸嘴吸入的水与从喷嘴排出的水一起朝向循环水箱的底部喷出。
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Patent Agency Ranking
公开(公告)号：US12300520B2
公开(公告)日：2025-05-13
申请号：US17746279
申请日：2022-05-17
Inventor： Motoshi Kohaku , Yukihiro Fukusumi , Nobutaka Bannai , Hiromasa Miyata , Naoya Hanafusa , Ken Taoka , Kazutomo Miyazaki
Abstract: A sub-fab area installation apparatus includes: a vacuum pump configured to evacuate a processing gas from a processing chamber of the semiconductor manufacturing equipment; a cooling unit configured to cool a first circulation liquid used in the processing chamber; a heating unit configured to heat a second circulation liquid used in the processing chamber; and a cooling-liquid line configured to pass a cooling liquid therethrough. The cooling liquid is supplied from a cooling source. The cooling-liquid line includes: a distribution line configured to supply the cooling liquid to the vacuum pump and the cooling unit; and a merging return line configured to merge the cooling liquid that has passed through the vacuum pump and the cooling unit and return the cooling liquid to the cooling source.
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公开(公告)号：US11090619B2
公开(公告)日：2021-08-17
申请号：US17061899
申请日：2020-10-02
Applicant: EBARA CORPORATION
Inventor： Keisuke Matsushima , Kazutomo Miyazaki
Abstract: An exhaust system capable of diluting a hydrogen gas to a concentration below the lower explosive limit without requiring a large amount of dilution gas while preventing an increase in a pressure of an exhaust gas in a buffer tank is disclosed. The exhaust system performs, when a main valve disposed in an exhaust line is closed, an initial exhaust operation in which a gas heavier than the hydrogen gas is discharged from a lower part of a buffer tank while an inlet valve disposed in an inlet line and a first outlet valve disposed in an outlet line are opened to introduce the exhaust gas from an equipment in a tangential direction of a buffer tank. Next, the exhaust system performs a hydrogen-gas discharge operation in which the inlet valve and the first outlet valve are closed, and the a bypass valve disposed in a bypass line and the second outlet valve disposed in a hydrogen-gas discharge line are opened to discharge the hydrogen gas stayed in an upper part of the buffer tank while flowing the exhaust gas into a bypass line.
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公开(公告)号：US10557631B2
公开(公告)日：2020-02-11
申请号：US16049927
申请日：2018-07-31
Applicant: EBARA CORPORATION
Inventor： Kazutomo Miyazaki , Tetsuo Komai , Seiji Kashiwagi
Abstract: An exhaust gas treatment apparatus for treating an exhaust gas discharged from an EUV (Extreme Ultra Violet) exposure equipment by combustion treatment to make the exhaust gas harmless is disclosed. The exhaust gas treatment apparatus includes a cylindrical combustion chamber configured to combust a processing gas containing hydrogen, and a processing gas nozzle and an oxidizing gas nozzle provided on the combustion chamber and configured to blow the processing gas and an oxidizing gas, respectively, in a tangential direction to an inner circumferential surface of the combustion chamber, wherein the processing gas nozzle and the oxidizing gas nozzle are positioned in the same plane perpendicular to an axis of the combustion chamber.
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公开(公告)号：US11511226B2
公开(公告)日：2022-11-29
申请号：US17522329
申请日：2021-11-09
Applicant: EBARA CORPORATION
Inventor： Takafumi Sekine , Kazutomo Miyazaki
Abstract: A process gas suction structure for preventing a generation of products from a process gas due to a temperature drop is disclosed. The process gas suction structure includes a double tube structure, and a heating device configured to heat the double tube structure. The double tube structure includes a process-gas flow passage portion where the process gas flows, and a partition portion arranged outside of the process-gas flow passage portion.
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公开(公告)号：US10920981B2
公开(公告)日：2021-02-16
申请号：US16326251
申请日：2017-08-18
Applicant: EBARA CORPORATION
Inventor： Kazutomo Miyazaki , Tetsuo Komai , Seiji Kashiwagi , Kazumasa Hosotani , Takeshi Eda
Abstract: A burner head that constitutes a combustion chamber for an exhaust gas processing apparatus by being attached to an upper portion of a combustion chamber main body is provided. The burner head includes a chassis which has a cylindrical portion having a lower opening and in which a fastening module for removably fastening to the combustion chamber main body is provided, a fuel nozzle that blows fuel into the cylindrical portion, a combustion supporting gas nozzle that blows combustion supporting gas into the cylindrical portion, a processing gas nozzle that blows processing gas into the cylindrical portion, and a pilot burner that ignites the fuel and/or the combustion supporting gas.
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