公开(公告)号：US10215407B2

公开(公告)日：2019-02-26

申请号：US15556582

申请日：2015-11-06

Applicant: Ebara Corporation

Inventor： Kazutomo Miyazaki ,  Tetsuo Komai ,  Toyoji Shinohara ,  Seiji Kashiwagi

IPC: F23G7/06 ,  F01N3/24 ,  F23L1/00 ,  F23M5/08 ,  F23C3/00

Abstract: A hybrid stepping motor has a connector housing formed integrally with an insulator having an upper insulator and a lower insulator. The hybrid stepping motor includes a stator core and output terminals concentrically disposed outside the stator core. A wiring pattern serving as the output terminals has connector pins and land portions disposed eccentrically with respect to one another. The land portions are formed on an outer edge side of the wiring pattern. A surface, which is an uppermost surface of the wiring pattern, is located below a lowermost surface, in which jumper wires and lead wires pass, of the lower insulator. The lead wires are pulled out from a lower side, and are pulled out to guiding grooves.

公开(公告)号：US11198160B2

公开(公告)日：2021-12-14

申请号：US16597163

申请日：2019-10-09

Applicant: EBARA CORPORATION

Inventor： Takanori Inada ,  Tetsuo Komai ,  Tetsuro Sugiura

IPC: B08B9/032 ,  B01D47/06 ,  B01D53/34 ,  B08B17/02 ,  C23C16/44 ,  B08B3/10

Abstract: A detoxifying device 100 having an inner wall 104 that forms a flow passage 103 through which treatment gas flows includes a first piping 130 that forms a part of the flow passage 103, a replaceable piping section 170 that forms a part of the flow passage 103 at the position downstream of the first piping 130, and is connected thereto for sprinkling the cleaning water to remove the solid product adhering to the inner wall 104, and a second piping 150 that forms a part of the flow passage 103 at the position downstream of the piping section 170, and is connected thereto.

公开(公告)号：US10557631B2

公开(公告)日：2020-02-11

申请号：US16049927

申请日：2018-07-31

Applicant: EBARA CORPORATION

Inventor： Kazutomo Miyazaki ,  Tetsuo Komai ,  Seiji Kashiwagi

IPC: F23G7/06 ,  F23G5/32 ,  F23G5/24 ,  F23G5/12

Abstract: An exhaust gas treatment apparatus for treating an exhaust gas discharged from an EUV (Extreme Ultra Violet) exposure equipment by combustion treatment to make the exhaust gas harmless is disclosed. The exhaust gas treatment apparatus includes a cylindrical combustion chamber configured to combust a processing gas containing hydrogen, and a processing gas nozzle and an oxidizing gas nozzle provided on the combustion chamber and configured to blow the processing gas and an oxidizing gas, respectively, in a tangential direction to an inner circumferential surface of the combustion chamber, wherein the processing gas nozzle and the oxidizing gas nozzle are positioned in the same plane perpendicular to an axis of the combustion chamber.

公开(公告)号：US10920981B2

公开(公告)日：2021-02-16

申请号：US16326251

申请日：2017-08-18

Applicant: EBARA CORPORATION

Inventor： Kazutomo Miyazaki ,  Tetsuo Komai ,  Seiji Kashiwagi ,  Kazumasa Hosotani ,  Takeshi Eda

IPC: C10L10/00 ,  F23G7/06 ,  F23D14/24 ,  F23D14/20 ,  F23D14/50 ,  F23D14/62 ,  F23G5/12 ,  F23D14/32

Abstract: A burner head that constitutes a combustion chamber for an exhaust gas processing apparatus by being attached to an upper portion of a combustion chamber main body is provided. The burner head includes a chassis which has a cylindrical portion having a lower opening and in which a fastening module for removably fastening to the combustion chamber main body is provided, a fuel nozzle that blows fuel into the cylindrical portion, a combustion supporting gas nozzle that blows combustion supporting gas into the cylindrical portion, a processing gas nozzle that blows processing gas into the cylindrical portion, and a pilot burner that ignites the fuel and/or the combustion supporting gas.

公开(公告)号：US10040026B2

公开(公告)日：2018-08-07

申请号：US15201923

申请日：2016-07-05

Applicant: EBARA CORPORATION

Inventor： Hiroki Furuta ,  Tetsuro Sugiura ,  Tetsuo Komai ,  Atsushi Oyama ,  Takashi Kyotani ,  Shinichi Sekiguchi ,  Takanori Inada

IPC: B01D53/78 ,  B01D47/06 ,  B01D53/38 ,  H02K5/128 ,  H02K5/167 ,  H02K1/32 ,  H02K7/14

Abstract: The fan scrubber is provided with a casing having a gas draw-in port and a gas ejection port, a fan disposed in the casing, a nozzle from which a liquid is jetted into the casing, and a canned motor connected to the fan. The canned motor has a main shaft connected to the fan, a rotor which rotates integrally with the main shaft, a stator disposed on the periphery of the rotor, a motor casing in which the rotor and the stator are housed, and a can which partitions the interior of the motor casing into a rotor chamber in which the rotor is disposed and a stator chamber in which the stator is disposed.

公开(公告)号：US10978315B2

公开(公告)日：2021-04-13

申请号：US15313990

申请日：2015-05-28

Applicant: EBARA CORPORATION

Inventor： Atsushi Shiokawa ,  Tetsuro Sugiura ,  Shinichi Sekiguchi ,  Takashi Kyotani ,  Tetsuo Komai ,  Norio Kimura ,  Keiichi Ishikawa ,  Toru Osuga

IPC: C23C16/44 ,  H01L21/67 ,  F04B37/16 ,  H01L21/205 ,  H01L21/3065 ,  H01L21/31 ,  C23C16/52 ,  F04B37/14 ,  H01J37/32 ,  F04B41/00 ,  C23C14/22 ,  G05D16/20

Abstract: The present invention relates to a vacuum evacuation system used to evacuate a processing gas from one or more process chambers for use in, for example, a semiconductor-device manufacturing apparatus. The vacuum evacuation system is a vacuum apparatus for evacuating a gas from a plurality of process chambers (1). The vacuum evacuation system includes a plurality of first vacuum pumps (5) coupled to the plurality of process chambers (1) respectively, a collecting pipe (7) coupled to the plurality of first vacuum pumps (5), and a second vacuum pump (8) coupled to the collecting pipe (7).