Invention Grant
- Patent Title: System of height and alignment rollers for precise alignment of wafers for ion implantation
-
Application No.: US16040423Application Date: 2018-07-19
-
Publication No.: US10559710B2Publication Date: 2020-02-11
- Inventor: William Eugene Runstadler, Jr. , Babak Adibi , Terry Bluck
- Applicant: Intevac, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: INTEVAC, INC.
- Current Assignee: INTEVAC, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Womble Bond Dickinson (US) LLP
- Agent Joseph Bach, Esq.
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/18 ; H01J37/317 ; H01L31/18

Abstract:
A system for transporting substrates and precisely alignment the substrates to shadow masks. The system decouples the functions of transporting the substrates, vertically aligning the substrates, and horizontally aligning the substrates. The transport system includes a carriage upon which plurality of pedestals are loosely positioned, each of the pedestals includes a base having vertical alignment wheels to place the substrate in precise vertical alignment. Two sidebars are configured to freely slide on the base. Each of the sidebars includes a set of horizontal alignment wheels that precisely align the substrate in the horizontal direction. Substrate support claws are attached to the sidebars in precise alignment to the vertical alignment wheels and the horizontal alignment wheels.
Public/Granted literature
- US20190027636A1 SYSTEM FOR ACCURATE ALIGNMENT OF WAFERS FOR ION IMPLANTATION Public/Granted day:2019-01-24
Information query