公开(公告)号：US10418260B2

公开(公告)日：2019-09-17

申请号：US15690211

申请日：2017-08-29

申请人： Intevac, Inc.

发明人： Terry Bluck ,  Terry Pederson ,  William Eugene Runstadler, Jr.

IPC分类号： H01L21/67 ,  H01L21/673 ,  H01L21/677 ,  H01L21/687 ,  H01L21/768 ,  H01L21/56

摘要： A system for fan out chip encapsulation processing is provided, wherein a plurality of microchips are encapsulated in molding compound, the system comprising: an atmospheric loading camber, configured to load substrates onto carriers in atmospheric environment; an entry loadlock arrangement configured to introduce the carriers into vacuum environment of the system; a degas chamber positioned downstream of the loadlock arrangement within the vacuum environment, the degas chamber comprising a heating element and a pumping arrangement to remove gases emitted from the molding compound; an etch chamber positioned downstream of the degas chamber and within the vacuum environment, the etch chamber comprising an ion beam generator and an ion neutralizer; a metal sputtering chamber positioned downstream of the etch chamber and inside the vacuum environment; and, an exit loadlock arrangement configured to remove carriers from the vacuum environment.

公开(公告)号：US10446430B2

公开(公告)日：2019-10-15

申请号：US15410634

申请日：2017-01-19

申请人： Intevac, Inc.

发明人： Terry Bluck ,  Babak Adibi ,  Vinay Prabhakar ,  William Eugene Runstadler, Jr.

IPC分类号： H01L21/683 ,  H01L21/66 ,  H01L21/67 ,  H01L21/687

摘要： A chuck for wafer processing that counters the deleterious effects of thermal expansion of the wafer. Also, a combination of chuck and shadow mask arrangement that maintains relative alignment between openings in the mask and the wafer in spite of thermal expansion of the wafer. A method for fabricating a solar cell by ion implant, while maintaining relative alignment of the implanted features during thermal expansion of the wafer.

公开(公告)号：US10679883B2

公开(公告)日：2020-06-09

申请号：US15284241

申请日：2016-10-03

申请人： Intevac, Inc.

发明人： Terry Bluck ,  Aaron Zanetto ,  William Eugene Runstadler, Jr. ,  Terry Pederson

IPC分类号： H01L21/68 ,  H01L21/683 ,  H01L21/677 ,  H01L31/18 ,  C23C16/04 ,  H01L21/673 ,  C23C14/04 ,  C23C16/458 ,  C23C14/50

摘要： A system for processing wafers in a vacuum processing chamber. Carrier comprising a frame having a plurality of openings, each opening configured to accommodate one wafer. A transport mechanism configured to transport the plurality of carriers throughout the system. A plurality of wafer plates configured for supporting wafers. An attachment mechanism for attaching a plurality of wafer plates to each of the carriers, wherein each of the wafer plates is attached to a corresponding position at an underside of a corresponding carrier, such that each of the wafers positioned on one of the wafer carriers is positioned within one of the plurality of opening in the carrier. Mask attached over front side of one of the plurality of opening in the carrier. Alignment stage supports wafer plate under the opening in the carrier. A camera positioned to simultaneously image the mask and the wafer.

公开(公告)号：US10559710B2

公开(公告)日：2020-02-11

申请号：US16040423

申请日：2018-07-19

申请人： Intevac, Inc.

发明人： William Eugene Runstadler, Jr. ,  Babak Adibi ,  Terry Bluck

IPC分类号： H01J37/20 ,  H01J37/18 ,  H01J37/317 ,  H01L31/18

摘要： A system for transporting substrates and precisely alignment the substrates to shadow masks. The system decouples the functions of transporting the substrates, vertically aligning the substrates, and horizontally aligning the substrates. The transport system includes a carriage upon which plurality of pedestals are loosely positioned, each of the pedestals includes a base having vertical alignment wheels to place the substrate in precise vertical alignment. Two sidebars are configured to freely slide on the base. Each of the sidebars includes a set of horizontal alignment wheels that precisely align the substrate in the horizontal direction. Substrate support claws are attached to the sidebars in precise alignment to the vertical alignment wheels and the horizontal alignment wheels.