Invention Grant
- Patent Title: Texture breaking layer to decouple bottom electrode from PMTJ device
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Application No.: US16072301Application Date: 2016-04-01
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Publication No.: US10559744B2Publication Date: 2020-02-11
- Inventor: Brian Maertz , Christopher J. Wiegand , Daniel G. Oeullette , Md Tofizur Rahman , Oleg Golonzka , Justin S. Brockman , Tahir Ghani , Brian S. Doyle , Kevin P. O'Brien , Mark L. Doczy , Kaan Oguz
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt P.C.
- International Application: PCT/US2016/025709 WO 20160401
- International Announcement: WO2017/171869 WO 20171005
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L43/08 ; H01L43/10 ; H01L43/12 ; H01L27/22

Abstract:
An apparatus including an array of memory cells arranged in a grid defined by word lines and bit lines in a generally orthogonal orientation relative to one another, a memory cell including a resistive memory component and an access transistor, wherein the access transistor includes a diffusion region disposed at an acute angle relative to an associated word line. A method including etching a substrate to form a plurality of fins each including a body having a length dimension including a plurality of first junction regions and a plurality of second junction regions that are generally parallel to one another and offset by angled channel regions displacing in the length dimension an end of a first junction region from the beginning of a second junction region; removing the spacer material; and introducing a gate electrode on the channel region of each of the plurality of fins.
Public/Granted literature
- US20190036010A1 TEXTURE BREAKING LAYER TO DECOUPLE BOTTOM ELECTRODE FROM PMTJ DEVICE Public/Granted day:2019-01-31
Information query
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