Invention Grant
- Patent Title: Cleaning compositions for removing post etch residue
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Application No.: US15821217Application Date: 2017-11-22
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Publication No.: US10577567B2Publication Date: 2020-03-03
- Inventor: Makonnen Payne , Emanuel I. Cooper , WonLae Kim , Eric Hong , Sean Kim
- Applicant: Entegris, Inc.
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Entegris, Inc.
- Main IPC: C11D7/32
- IPC: C11D7/32 ; C11D3/33 ; C11D7/36 ; C11D3/00 ; G03F7/42 ; C11D11/00 ; C11D1/62 ; C11D3/06 ; C11D3/20 ; C11D3/28 ; C11D3/39 ; C11D3/43 ; H01L21/02

Abstract:
The disclosure relates to a cleaning composition that aids in the removal of post-etch residues in the production of semiconductors. There is provided a stock composition comprising: a tetraalkylammonium hydroxide base or a quaternary trialkylalkanolamine base; a corrosion inhibitor; and a combination of at least two or more polyprotic acids or salts thereof, wherein at least one said polyprotic acid or salt thereof contains phosphorous.
Public/Granted literature
- US20180148669A1 CLEANING COMPOSITIONS FOR REMOVING POST ETCH RESIDUE Public/Granted day:2018-05-31
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