Invention Grant
- Patent Title: Substrate liquid processing apparatus, substrate liquid processing method and recording medium
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Application No.: US15633910Application Date: 2017-06-27
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Publication No.: US10584420B2Publication Date: 2020-03-10
- Inventor: Kazuki Motomatsu , Satoshi Kaneko , Kazunori Sakamoto
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2016-131810 20160701
- Main IPC: C23C18/16
- IPC: C23C18/16 ; C23C18/18 ; C23C18/38 ; C23C18/42 ; C23C18/32

Abstract:
A substrate liquid processing apparatus 1 includes a substrate holding unit 52 configured to hold a substrate W; a processing liquid supply unit 53 configured to supply a processing liquid L1 onto a top surface of the substrate W held by the substrate holding unit 52; and a cover body 6 configured to cover the substrate W. Here, the cover body 6 includes a ceiling unit 61 disposed above the substrate W, a sidewall unit 62 downwardly extended from the ceiling unit 61, and a heating unit 63 provided at the ceiling unit 61 and configured to heat the processing liquid L1 on the substrate W. The sidewall unit 62 of the cover body 6 is placed at an outer periphery side of the substrate W when the processing liquid L1 on the substrate W is heated.
Public/Granted literature
- US20180002811A1 SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING METHOD AND RECORDING MEDIUM Public/Granted day:2018-01-04
Information query
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