Invention Grant
- Patent Title: Vertical vacuum channel transistor with minimized air gap between tip and gate
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Application No.: US16391629Application Date: 2019-04-23
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Publication No.: US10600606B2Publication Date: 2020-03-24
- Inventor: Injo Ok , Choonghyun Lee , Soon-Cheon Seo , Seyoung Kim
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01J21/10 ; H01J9/18 ; H01J19/24 ; H01L29/788 ; H01L27/11556 ; H01L29/66 ; H01L21/02 ; H01L29/78 ; H01L29/786

Abstract:
A method is presented for controlling an electric field from a gate structure. The method includes forming a hardmask over a fin stack including a plurality of layers, forming a first dielectric layer over the hardmask, forming a sacrificial layer over the first dielectric layer, etching the sacrificial layer to expose a top surface of the first dielectric layer, depositing a second dielectric layer in direct contact with exposed surfaces of the first dielectric layer and the sacrificial layer, removing a layer of the plurality of layers of the fin stack to define an air gap within the fin stack, and forming triangle-shaped epitaxial growths within the air gap defined within the fin stack.
Public/Granted literature
- US20190378675A1 VERTICAL VACUUM CHANNEL TRANSISTOR WITH MINIMIZED AIR GAP BETWEEN TIP AND GATE Public/Granted day:2019-12-12
Information query
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