Invention Grant
- Patent Title: Inner spacer formation in a nanosheet field-effect transistor
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Application No.: US15680467Application Date: 2017-08-18
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Publication No.: US10651291B2Publication Date: 2020-05-12
- Inventor: Julien Frougier , Ruilong Xie
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L29/20
- IPC: H01L29/20 ; H01L29/16 ; H01L29/66 ; H01L29/06 ; H01L29/78 ; H01L29/423 ; H01L29/10 ; H01L29/08 ; H01L21/223 ; H01L21/311 ; H01L29/775 ; B82Y10/00 ; H01L29/40 ; H01L29/786

Abstract:
Structures for a nanosheet field-effect transistor and methods for forming a structure for a nanosheet field-effect transistor. A body feature is formed that includes a sacrificial layer arranged vertically between the first and second nanosheet channel layers. The sacrificial layer is laterally recessed at a sidewall of the body feature to expose respective portions of the first and second nanosheet channel layers. A sacrificial spacer is formed by oxidizing a portion of the sacrificial layer at the sidewall of the body feature. Sections of a semiconductor material are epitaxially grown on the exposed portions of the first and second nanosheet channel layers to narrow a gap vertically separating the first and second nanosheet channel layers. The sacrificial spacer is removed to form a cavity between the sections of the semiconductor material and the sacrificial layer. A dielectric spacer is conformally deposited in the cavity.
Public/Granted literature
- US20190058052A1 INNER SPACER FORMATION IN A NANOSHEET FIELD-EFFECT TRANSISTOR Public/Granted day:2019-02-21
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