Invention Grant
- Patent Title: Piezoelectric micromachined ultrasonic transducer (PMUT)
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Application No.: US15205743Application Date: 2016-07-08
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Publication No.: US10656255B2Publication Date: 2020-05-19
- Inventor: Eldwin Ng , Julius Ming-Lin Tsai , Nikhil Apte
- Applicant: InvenSense, Inc.
- Applicant Address: US CA San Jose
- Assignee: InvenSense, Inc.
- Current Assignee: InvenSense, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L41/047
- IPC: H01L41/047 ; G01S7/521 ; B06B1/06 ; H01L41/09 ; A61B5/1172 ; A61B8/00 ; G01S15/89

Abstract:
A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. A membrane is connected to the edge support structure such that a cavity is defined between the membrane and the substrate, where the membrane is configured to allow movement at ultrasonic frequencies. The membrane includes a piezoelectric layer and first and second electrodes coupled to opposing sides of the piezoelectric layer. An interior support structure is disposed within the cavity and connected to the substrate and the membrane.
Public/Granted literature
- US20170322290A1 PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER (PMUT) Public/Granted day:2017-11-09
Information query
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