Invention Grant
- Patent Title: Oxide sintered body, method for producing same and sputtering target
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Application No.: US16068596Application Date: 2016-12-28
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Publication No.: US10669208B2Publication Date: 2020-06-02
- Inventor: Kenichi Itoh , Hiroyuki Hara , Shinichi Hara
- Applicant: TOSOH CORPORATION
- Applicant Address: JP Shunan-shi
- Assignee: TOSOH CORPORATION
- Current Assignee: TOSOH CORPORATION
- Current Assignee Address: JP Shunan-shi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@686fa192 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3f35b87f
- International Application: PCT/JP2016/089029 WO 20161228
- International Announcement: WO2017/119381 WO 20170713
- Main IPC: C04B35/64
- IPC: C04B35/64 ; C04B35/453 ; H01J37/34 ; C23C14/34 ; C23C14/08 ; C04B35/626

Abstract:
An oxide sintered body is provided which does not splash from the target surface even at the time of high power film formation, has a high film formation rate, and is used in a sputtering target capable of providing a high-refractive-index film.An oxide sintered body is used which contains zinc, niobium, aluminum and oxygen as constituent elements and in which Nb/(Zn+Nb+Al)=0.076 to 0.289 and Al/(Zn+Nb+Al)=0.006 to 0.031, where Zn, Nb and Al denote contents of zinc, niobium and aluminum, respectively.
Public/Granted literature
- US20190016638A1 OXIDE SINTERED BODY, METHOD FOR PRODUCING SAME AND SPUTTERING TARGET Public/Granted day:2019-01-17
Information query
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