Invention Grant
- Patent Title: Bootstrap metal-oxide-semiconductor (MOS) device integrated with a high voltage MOS (HVMOS) device and a high voltage junction termination (HVJT) device
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Application No.: US16128578Application Date: 2018-09-12
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Publication No.: US10679987B2Publication Date: 2020-06-09
- Inventor: Karthick Murukesan , Wen-Chih Chiang , Chiu-Hua Chung , Chun Lin Tsai , Kuo-Ming Wu , Shiuan-Jeng Lin , Tien Sheng Lin , Yi-Min Chen , Hung-Chou Lin , Yi-Cheng Chiu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L27/07 ; H01L21/8234 ; H01L21/761 ; H01L29/78 ; H01L27/06 ; H01L29/861

Abstract:
Various embodiments of the present application are directed towards an integrated circuit (IC) in which a bootstrap metal-oxide-semiconductor (MOS) device is integrated with a high voltage metal-oxide-semiconductor (HVMOS) device and a high voltage junction termination (HVJT) device. In some embodiments, a drift well is in the semiconductor substrate. The drift well has a first doping type and has a ring-shaped top layout. A first switching device is on the drift well. A second switching device is on the semiconductor substrate, at an indent in a sidewall the drift well. A peripheral well is in the semiconductor substrate and has a second doping type opposite the first doping type. The peripheral well surrounds the drift well, the first switching device, and the second switching device, and further separates the second switching device from the drift well and the first switching device.
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