- Patent Title: Three dimensional memory device and method for fabricating the same
-
Application No.: US16159753Application Date: 2018-10-15
-
Publication No.: US10685971B2Publication Date: 2020-06-16
- Inventor: Yu-Wei Jiang , Chieh-Fang Chen , Jia-Rong Chiou
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L21/822 ; H01L21/8234 ; H01L27/11521 ; H01L27/11556 ; H01L27/11568 ; H01L27/11582 ; G11C5/02 ; G11C5/06 ; G11C5/12 ; G11C16/04

Abstract:
A 3D memory device includes a substrate, a plurality of conductive layers, a plurality of insulating layers, a memory layer and a channel layer. The insulating layers are alternately stacked with the conductive layers on the substrate to form a multi-layers stacking structure, wherein the multi-layers stacking structure has at least one trench penetrating through the insulating layers and the conductive layers. The memory layer covers on the multi-layers stacking structure and at least extends onto a sidewall of the trench. The cannel layer covers on the memory layer and includes an upper portion adjacent to an opening of the trench, a lower portion adjacent to a bottom of the trench and a string portion disposed on the sidewall, wherein the string portion connects the upper portion with the lower portion and has a doping concentration substantially lower than that of the upper portion and lower portion.
Public/Granted literature
- US20200119025A1 THREE DIMENSIONAL MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2020-04-16
Information query
IPC分类: