Invention Grant
- Patent Title: Memory cell comprising non-self-aligned horizontal and vertical control gates
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Application No.: US16513145Application Date: 2019-07-16
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Publication No.: US10686046B2Publication Date: 2020-06-16
- Inventor: Francesco La Rosa , Stephan Niel , Arnaud Regnier , Julien Delalleau
- Applicant: STMicroelectronics (Rousset) SAS
- Applicant Address: FR Rousset
- Assignee: STMicroelectronics (Rousset) SAS
- Current Assignee: STMicroelectronics (Rousset) SAS
- Current Assignee Address: FR Rousset
- Agency: Seed IP Law Group LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5f6bb908
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L29/423 ; H01L21/28 ; H01L29/66 ; H01L27/11521 ; G11C16/04 ; G11C16/14 ; H01L21/3205 ; H01L21/3213 ; H01L27/11524 ; H01L29/78 ; H01L21/306

Abstract:
The present disclosure relates to a memory cell comprising a vertical selection gate extending in a trench made in a substrate, a floating gate extending above the substrate, and a horizontal control gate extending above the floating gate, wherein the floating gate also extends above a portion of the vertical selection gate over a non-zero overlap distance. Application mainly to the production of a split gate memory cell programmable by hot-electron injection.
Public/Granted literature
- US20190341462A1 MEMORY CELL COMPRISING NON-SELF-ALIGNED HORIZONTAL AND VERTICAL CONTROL GATES Public/Granted day:2019-11-07
Information query
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