Invention Grant
- Patent Title: Gate cut isolation formed as layer against sidewall of dummy gate mandrel
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Application No.: US16194691Application Date: 2018-11-19
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Publication No.: US10707206B2Publication Date: 2020-07-07
- Inventor: Hui Zang , Laertis Economikos , Ruilong Xie
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: US KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: US KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Francois Pagette
- Main IPC: H01L27/08
- IPC: H01L27/08 ; H01L29/66 ; H01L27/088 ; H01L29/06 ; H01L29/78 ; H01L21/762 ; H01L21/28 ; H01L21/306 ; H01L21/3105 ; H01L21/311

Abstract:
A method of forming a gate cut isolation, a related structure and IC are disclosed. The method forms a dummy gate material mandrel having a sidewall positioned between and spaced from a first active region covered by the mandrel and a second active region not covered by the mandrel. A gate cut dielectric layer is formed against the sidewall of the mandrel, and may be trimmed. A dummy gate material may deposited to encase the remaining gate cut dielectric layer. Subsequent dummy gate formation and replacement metal gate processing forms a gate conductor with the gate cut isolation electrically isolating respective first and second portions of the gate conductor. The method creates a very thin, slightly non-vertical gate cut isolation, and eliminates the need to define a gate cut critical dimension or fill a small gate cut opening.
Public/Granted literature
- US20200161296A1 GATE CUT ISOLATION FORMED AS LAYER AGAINST SIDEWALL OF DUMMY GATE MANDREL Public/Granted day:2020-05-21
Information query
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