Invention Grant
- Patent Title: EFEM robot auto teaching methodology
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Application No.: US15822865Application Date: 2017-11-27
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Publication No.: US10861723B2Publication Date: 2020-12-08
- Inventor: Chien-Fa Lee , Hsu-Shui Liu , Jiun-Rong Pai , Shou-Wen Kuo
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/677 ; H01L21/68 ; H01L21/687

Abstract:
The present disclosure relates to a method of automatically re-programming an EFEM to account for positional changes of the EFEM robot. In some embodiments, the method is performed by determining an initial position of an EFEM robot within an EFEM chamber. The EFEM robot at the initial position moves along a first plurality of steps defined relative to the initial position and that extend along a path between a first position and a second position. Positional parameters are determined, which describe a change between an initial position and a new position of the EFEM robot that is different than the initial position. A second plurality of steps are determined based upon the positional parameters. The EFEM robot at the new position moves along the second plurality of steps defined relative to the new position and that extend along the path between the first position and the second position.
Public/Granted literature
- US20190051546A1 EFEM ROBOT AUTO TEACHING METHODOLOGY Public/Granted day:2019-02-14
Information query
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