Invention Grant
- Patent Title: Microelectromechanical resonator system with improved stability with respect to temperature variations
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Application No.: US16171885Application Date: 2018-10-26
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Publication No.: US10862449B2Publication Date: 2020-12-08
- Inventor: Carlo Valzasina , Gabriele Gattere , Alessandro Tocchio , Giacomo Langfelder
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT102017000124320 20171031
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03B5/30 ; H03B5/04 ; H03L1/02 ; H03L7/197 ; H03H9/24

Abstract:
A MEMS resonator system has a micromechanical resonant structure and an electronic processing circuit including a first resonant loop that excites a first vibrational mode of the structure and generates a first signal at a first resonance frequency. A compensation module compensates, as a function of a measurement of temperature variation, a first variation of the first resonance frequency caused by the temperature variation to generate a clock signal at a desired frequency that is stable relative to temperature. The electronic processing circuit further includes a second resonant loop, which excites a second vibrational mode of the structure and generates a second signal at a second resonance frequency. A temperature-sensing module receives the first and second signals and generates the measurement of temperature variation as a function of the first variation of the first resonance frequency and a second variation of the second resonance frequency caused by the temperature variation.
Public/Granted literature
- US20190131952A1 MICROELECTROMECHANICAL RESONATOR SYSTEM WITH IMPROVED STABILITY WITH RESPECT TO TEMPERATURE VARIATIONS Public/Granted day:2019-05-02
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