Invention Grant
- Patent Title: Cap structure
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Application No.: US16573209Application Date: 2019-09-17
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Publication No.: US10930549B2Publication Date: 2021-02-23
- Inventor: Jinsheng Gao , Daniel Jaeger , Chih-Chiang Chang , Michael Aquilino , Patrick Carpenter , Junsic Hong , Mitchell Rutkowski , Haigou Huang , Huy Cao
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L21/768 ; H01L21/28 ; H01L21/311 ; H01L29/417

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to a cap structure and methods of manufacture. The structure includes: a gate structure composed of conductive gate material; sidewall spacers on the gate structure, extending above the conductive gate material; and a capping material on the conductive gate material and extending over the sidewall spacers on the gate structure.
Public/Granted literature
- US20200013672A1 CAP STRUCTURE Public/Granted day:2020-01-09
Information query
IPC分类: