- Patent Title: Slip-plane MEMS probe for high-density and fine pitch interconnects
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Application No.: US16145571Application Date: 2018-09-28
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Publication No.: US10935573B2Publication Date: 2021-03-02
- Inventor: Joe Walczyk , Pooya Tadayon
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Green, Howard & Mughal LLP.
- Main IPC: G01R1/06
- IPC: G01R1/06 ; G01R1/067 ; G01R3/00 ; B81B7/02 ; H01L23/00 ; G01R31/26

Abstract:
A device probe includes a primary probe arm and a subsequent probe arm with a slip plane spacing between the primary probe arm and subsequent probe arm. Each probe arm is integrally part of a probe base that is attachable to a probe card. During probe use on a semiconductive device or a semiconductor device package substrate, overtravel of the probe tip allows the primary and subsequent probe arms to deflect, while sufficient resistance to deflection creates a useful contact with an electrical structure such as an electrical bump or a bond pad.
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