Invention Grant
- Patent Title: Three-dimensional flat NAND memory device having high mobility channels and methods of making the same
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Application No.: US16877535Application Date: 2020-05-19
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Publication No.: US10950629B2Publication Date: 2021-03-16
- Inventor: Raghuveer S. Makala , Fei Zhou , Senaka Krishna Kanakamedala , Yao-Sheng Lee
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L21/02 ; H01L27/1157 ; H01L27/11529 ; H01L27/11524 ; H01L27/11565 ; H01L27/11578 ; H01L21/28 ; H01L27/11556

Abstract:
A three-dimensional memory device includes alternating stacks of insulating strips and electrically conductive strips laterally spaced apart by line trenches, and an alternating two-dimensional array of memory stack assemblies and dielectric pillar structures located in the line trenches. Each of the line trenches is filled with a respective laterally alternating sequence of memory stack assemblies and dielectric pillar structures. Each memory stack assembly includes a vertical semiconductor channel and a pair of memory film. The vertical semiconductor channel includes a semiconductor channel layer having large grains, which can be provided by a selective semiconductor growth from seed semiconductor material layers, sacrificial semiconductor material layers, or a single crystalline semiconductor material in a semiconductor substrate underlying the alternating stacks.
Public/Granted literature
- US20200279868A1 THREE-DIMENSIONAL FLAT NAND MEMORY DEVICE HAVING HIGH MOBILITY CHANNELS AND METHODS OF MAKING THE SAME Public/Granted day:2020-09-03
Information query
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