- 专利标题： High resistivity soft magnetic material for miniaturized power converter
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申请号： US15817858申请日： 2017-11-20
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公开(公告)号： US10971576B2公开(公告)日： 2021-04-06
- 发明人: Hariklia Deligianni , William J. Gallagher , Andrew J. Kellock , Eugene J. O'Sullivan , Lubomyr T. Romankiw , Naigang Wang
- 申请人： International Business Machines Corporation
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理机构： Cantor Colburn LLP
- 代理商 Robert Sullivan
- 主分类号： C23C18/16
- IPC分类号： C23C18/16 ; C23C18/18 ; C23C18/50 ; H01L49/02 ; H01L21/288 ; H01F5/00 ; H01F27/00 ; H01F41/04 ; H01L23/522 ; H01F41/26 ; H01F1/04 ; H01F27/24 ; H01F27/28
摘要：
An on-chip magnetic structure includes a magnetic material comprising cobalt in a range from about 80 to about 90 atomic % (at. %) based on the total number of atoms of the magnetic material, tungsten in a range from about 4 to about 9 at. % based on the total number of atoms of the magnetic material, phosphorous in a range from about 7 to about 15 at. % based on the total number of atoms of the magnetic material, and palladium substantially dispersed throughout the magnetic material.
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