Invention Grant
- Patent Title: Method for forming fuse pad and bond pad of integrated circuit
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Application No.: US15350372Application Date: 2016-11-14
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Publication No.: US11011462B2Publication Date: 2021-05-18
- Inventor: Tai-I Yang , Chun-Yi Yang , Chih-Hao Lin , Hong-Seng Shue , Ruei-Hung Jang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L23/62
- IPC: H01L23/62 ; H01L23/525 ; H01L23/00

Abstract:
The present disclosure relates to a semiconductor device. A fuse layer is arranged within a first dielectric layer. A bond pad is arranged on the first dielectric layer. A second dielectric layer is arranged along sidewall and upper surfaces of the bond pad. A passivation layer is arranged over the first and second dielectric layers, and the passivation layer having a bond pad opening overlying the bond pad and a fuse opening overlying the fuse layer. The bond pad has a bottom surface that is co-planar with a bottom surface of the passivation layer.
Public/Granted literature
- US20170062334A1 METHOD FOR FORMING FUSE PAD AND BOND PAD OF INTEGRATED CIRCUIT Public/Granted day:2017-03-02
Information query
IPC分类: