Invention Grant
- Patent Title: Faceted sidewall magnetic tunnel junction structure
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Application No.: US16746558Application Date: 2020-01-17
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Publication No.: US11011697B2Publication Date: 2021-05-18
- Inventor: Oscar van der Straten , Alexander Reznicek , Praneet Adusumilli
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent L. Jeffrey Kelly, Esq.
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/02 ; H01L43/10 ; H01L43/12 ; H01L43/08 ; G11C11/16

Abstract:
A magnetic tunnel junction (MTJ) structure having faceted sidewalls is formed on a conductive landing pad that is present on a surface of an electrically conductive structure embedded in a dielectric material layer. No metal ions are re-sputtered onto the sidewalls of the MTJ structure during the patterning of the MTJ material stack that provides the MTJ structure. The absence of re-sputtered metal on the MTJ structure sidewalls reduces the risk of shorts.
Public/Granted literature
- US20200152860A1 FACETED SIDEWALL MAGNETIC TUNNEL JUNCTION STRUCTURE Public/Granted day:2020-05-14
Information query
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