Invention Grant
- Patent Title: IC with test structures and e-beam pads embedded within a contiguous standard cell area
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Application No.: US16458082Application Date: 2019-06-30
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Publication No.: US11018126B1Publication Date: 2021-05-25
- Inventor: Stephen Lam , Dennis Ciplickas , Tomasz Brozek , Jeremy Cheng , Simone Comensoli , Indranil De , Kelvin Doong , Hans Eisenmann , Timothy Fiscus , Jonathan Haigh , Christopher Hess , John Kibarian , Sherry Lee , Marci Liao , Sheng-Che Lin , Hideki Matsuhashi , Kimon Michaels , Conor O'Sullivan , Markus Rauscher , Vyacheslav Rovner , Andrzej Strojwas , Marcin Strojwas , Carl Taylor , Rakesh Vallishayee , Larg Weiland , Nobuharu Yokoyama , Matthew Moe
- Applicant: PDF Solutions, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: PDF Solutions, Inc.
- Current Assignee: PDF Solutions, Inc.
- Current Assignee Address: US CA Santa Clara
- Agent David Garrod
- Main IPC: H01L27/02
- IPC: H01L27/02 ; H01J37/26 ; H01L21/66 ; H03K19/0944 ; H01L23/528 ; H01L27/088 ; H01L23/522 ; H01L21/3213 ; H01L29/08 ; H01L29/45 ; G01R31/28 ; H01L21/8234 ; G06F30/39
Abstract:
An IC that includes a contiguous standard cell area with a 4×3 e-beam pad that is compatible with advanced manufacturing processes and an associated e-beam testable structure.
Information query
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