Invention Grant
- Patent Title: Backside illuminated global shutter image sensor
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Application No.: US16556654Application Date: 2019-08-30
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Publication No.: US11018177B2Publication Date: 2021-05-25
- Inventor: Jeng-Shyan Lin , Shu-Ting Tsai , Tzu-Hsuan Hsu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
Various embodiments of the present disclosure are directed towards an image sensor. The image sensor includes a photodetector disposed in a semiconductor substrate. An interlayer dielectric (ILD) structure is disposed on a first side of the semiconductor substrate. A storage node is disposed in the semiconductor substrate and spaced from the photodetector, where the storage node is spaced from the first side by a first distance. A first isolation structure is disposed in the semiconductor substrate and between the photodetector and the storage node, where the first isolation structure extends into the semiconductor substrate from a second side of the semiconductor substrate that is opposite the first side, and where the first isolation structure is spaced from the first side by a second distance that is less than the first distance.
Public/Granted literature
- US20200381465A1 BACKSIDE ILLUMINATED GLOBAL SHUTTER IMAGE SENSOR Public/Granted day:2020-12-03
Information query
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