Invention Grant
- Patent Title: Apparatus for bond wave propagation control
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Application No.: US16654377Application Date: 2019-10-16
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Publication No.: US11031369B2Publication Date: 2021-06-08
- Inventor: Xin-Hua Huang , Kuan-Liang Liu , Kuo Liang Lu , Ping-Yin Liu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: B23K37/04
- IPC: B23K37/04 ; H01L23/00 ; H01L21/683 ; H01L21/67 ; H01L21/20 ; H01L21/762 ; B23K101/40

Abstract:
An apparatus and method is provided for controlling a propagation of a bond wave during semiconductor processing. The apparatus has a first chuck to selectively retain a first workpiece. A second chuck selectively retains a second workpiece. The first and second chucks selectively secure at least a periphery of the respective first workpiece and second workpiece. An air vacuum is circumferentially located in a region between the first chuck and second chuck. The air vacuum is configured to induce a vacuum between the first workpiece and second workpiece to selectively bring the first workpiece and second workpiece together from a propagation point. The air vacuum can be localized air vacuum guns, a vacuum disk, or an air curtain positioned about the periphery of the region between the first chuck and second chuck. The air curtain induces a lower pressure within the region between the first and second chucks.
Public/Granted literature
- US20200051950A1 APPARATUS FOR BOND WAVE PROPAGATION CONTROL Public/Granted day:2020-02-13
Information query
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