Invention Grant
- Patent Title: Semiconductor memory element, other elements, and their production methods
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Application No.: US16315784Application Date: 2017-07-03
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Publication No.: US11069713B2Publication Date: 2021-07-20
- Inventor: Mitsue Takahashi , Shigeki Sakai , Masaki Kusuhara , Masayuki Toda , Masaru Umeda , Yoshikazu Sasaki
- Applicant: National Institute of Advanced Industrial Science and Technology , WACOM R&D Corporation
- Applicant Address: JP Tokyo; JP Tokyo
- Assignee: National Institute of Advanced Industrial Science and Technology,WACOM R&D Corporation
- Current Assignee: National Institute of Advanced Industrial Science and Technology,WACOM R&D Corporation
- Current Assignee Address: JP Tokyo; JP Tokyo
- Agency: Nixon & Vanderhye
- Priority: JPJP2016-134625 20160706,JPJP2017-092894 20170509
- International Application: PCT/JP2017/024402 WO 20170703
- International Announcement: WO2018/008609 WO 20180111
- Main IPC: H01L27/1159
- IPC: H01L27/1159 ; H01L29/78 ; H01L21/28 ; H01L21/311 ; H01L29/49 ; H01L29/51 ; H01L29/66 ; H01L27/11587 ; H01L21/033

Abstract:
A semiconductor memory element is provided including a laminated structure, in which a memory member and a conductor are superposed on a semiconductor substrate. The memory member has a bottom surface in contact with the semiconductor substrate, an upper surface in contact with the conductor, and side surfaces, which are in contact with and surrounded by a partition wall; the bottom surface of the memory member has a width of equal to or not more than 100 nm; a shortest distance between the conductor and the semiconductor substrate is twice or more of the width of the bottom surface of the memory member; the side surface of the memory member has a width, which is either the same as the width of the bottom surface and constant at any position above the bottom surface, or the widest at a position other than the bottom surface and above the bottom surface.
Public/Granted literature
- US20190273086A1 SEMICONDUCTOR MEMORY ELEMENT, OTHER ELEMENTS, AND THEIR PRODUCTION METHODS Public/Granted day:2019-09-05
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