- Patent Title: Sensing an ICMFB output to detect functional state of a MEMS sensor
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Application No.: US15599234Application Date: 2017-05-18
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Publication No.: US11143670B2Publication Date: 2021-10-12
- Inventor: Davy Choi , Yamu Hu , Deyou Fang
- Applicant: STMicroelectronics, Inc.
- Applicant Address: US TX Coppell
- Assignee: STMicroelectronics, Inc.
- Current Assignee: STMicroelectronics, Inc.
- Current Assignee Address: US TX Coppell
- Agency: Slater Matsil, LLP
- Main IPC: G01P21/00
- IPC: G01P21/00 ; G01P15/125 ; G01R19/10 ; G01R31/28

Abstract:
In one embodiment, a method for detecting functional state of a microelectromechanical (MEMS) sensor is described. The method includes monitoring an input common-mode feedback (ICMFB) voltage generated by an ICMFB circuit coupled to the MEMS sensor through a plurality of nodes. The method also includes determining, using the monitored ICMFB voltage, whether all of the plurality of nodes of the MEMS sensor are electrically connected to the ICMFB circuit.
Public/Granted literature
- US20180335446A1 SENSING AN ICMFB OUTPUT TO DETECT FUNCTIONAL STATE OF A MEMS SENSOR Public/Granted day:2018-11-22
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