- 专利标题: Direct bonded heterogeneous integration packaging structures
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申请号: US16738196申请日: 2020-01-09
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公开(公告)号: US11177217B2公开(公告)日: 2021-11-16
- 发明人: Kamal K. Sikka , Jon A. Casey , Joshua Rubin , Arvind Kumar , Dinesh Gupta , Charles L. Arvin , Mark W. Kapfhammer , Steve Ostrander , Maryse Cournoyer , Valérie A. Oberson , Lawrence A. Clevenger
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 代理商 L. Jeffrey Kelly
- 主分类号: H01L23/538
- IPC分类号: H01L23/538 ; H01L23/367 ; H01L23/00 ; H01L23/31 ; H01L25/065
摘要:
Direct bonding heterogeneous integration packaging structures and processes include a packaging substrate with first and second opposing surfaces. A trench or a pedestal is provided in the first surface. A bridge is disposed in the trench or is adjacent the pedestal sidewall, wherein the bridge includes an upper surface coplanar with the first surface of the package substrate. At least two chips in a side by side proximal arrangement overly the bridge and the packaging substrate, wherein the bridge underlies peripheral edges of the at least two chips in the side by side proximal arrangement. The at least two chips include a plurality of electric connections that are directly coupled to corresponding electrical connections on the bridge and on the packaging substrate.
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