- Patent Title: Integrated structures and methods of forming integrated structures
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Application No.: US16783981Application Date: 2020-02-06
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Publication No.: US11195854B2Publication Date: 2021-12-07
- Inventor: Jie Li , James Mathew , Kunal Shrotri , Luan C. Tran , Gordon A. Haller , Yangda Zhang , Hongpeng Yu , Minsoo Lee
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11556 ; H01L27/11524 ; H01L27/1157

Abstract:
Some embodiments include an integrated structure having a first opening extending through a stack of alternating insulative levels and conductive levels. A nitride structure is within the first opening and narrows the first opening to form a second opening. Detectable oxide is between the nitride structure and one or more of the conductive levels. Some embodiments include an integrated structure having a conductive material, a select device gate material over the conductive material, and vertically-stacked conductive levels over the select device gate material. A first opening extends through the vertically-stacked levels to the conductive material and has opposing sidewalls along a cross-section. Nitride liners are along the sidewalls of the first opening. Detectable oxide is between at least one of the nitride liners and one or more of the vertically-stacked conductive levels. Some embodiments include methods for forming integrated structures.
Public/Granted literature
- US20200176471A1 Integrated Structures and Methods of Forming Integrated Structures Public/Granted day:2020-06-04
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