- 专利标题: Polishing composition
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申请号: US16649407申请日: 2018-09-28
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公开(公告)号: US11225590B2公开(公告)日: 2022-01-18
- 发明人: Hiroki Kon , Naoto Noguchi
- 申请人: FUJIMI INCORPORATED
- 申请人地址: JP Kiyosu
- 专利权人: FUJIMI INCORPORATED
- 当前专利权人: FUJIMI INCORPORATED
- 当前专利权人地址: JP Kiyosu
- 代理机构: Katten Muchin Rosenman LLP
- 优先权: JP2017-189363 20170929
- 国际申请: PCT/JP2018/036320 WO 20180928
- 国际公布: WO2019/065994 WO 20190404
- 主分类号: C09G1/02
- IPC分类号: C09G1/02 ; H01L21/321 ; H01L21/304 ; H01L21/306
摘要:
An object of the present invention is to provide a polishing composition that can achieve both a high polishing removal rate and high surface quality. According to the present invention, provided is a polishing composition for polishing a material to be polished. The polishing composition contains sodium metavanadate, hydrogen peroxide, and silica abrasive. The content C1 of sodium metavanadate is 0.7% to 3.5% by weight, the content C2 of hydrogen peroxide is 0.3% to 3% by weight, and the content C3 of the silica abrasive is 12% to 50% by weight.
公开/授权文献
- US20200299546A1 POLISHING COMPOSITION 公开/授权日:2020-09-24
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