Invention Grant
- Patent Title: Positive-type photosensitive resin composition and cured film prepared therefrom
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Application No.: US16664994Application Date: 2019-10-28
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Publication No.: US11226558B2Publication Date: 2022-01-18
- Inventor: Kahee Shin , Eun-Young Lee , Jong-Ho Na , Geun Huh
- Applicant: ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.
- Current Assignee: ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.
- Current Assignee Address: KR Chungcheongnam-do
- Agent G. Creston Campbell
- Priority: KR10-2018-0135257 20181106
- Main IPC: G03F7/023
- IPC: G03F7/023 ; G03F7/033 ; G03F7/039 ; C08F220/14 ; G03F7/031

Abstract:
The present invention relates to a positive-type photosensitive resin composition and a cured film prepared therefrom. The composition comprises a photopolymerizable compound containing a double bond and a specific photopolymerization initiator, wherein the photopolymerizable compound containing a double bond suppresses the photopolymerization reaction upon exposure to light but causes the photopolymerization reaction at the time of photobleaching after development, thereby controlling the flowability of the composition during thermal curing. Thus, a pattern is readily formed, which makes it possible to maintain excellent sensitivity upon the development and even upon the hard-bake process after the development, and it is possible to provide a cured film that is excellent in film strength and film retention rate.
Information query
IPC分类: