Invention Grant
- Patent Title: Self-aligned spin orbit torque (SOT) memory devices and their methods of fabrication
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Application No.: US15942086Application Date: 2018-03-30
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Publication No.: US11227644B2Publication Date: 2022-01-18
- Inventor: Kevin O'Brien , Noriyuki Sato , Kaan Oguz , Mark Doczy , Charles Kuo
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Essential Patents Group, LLP
- Main IPC: G11C11/16
- IPC: G11C11/16 ; H01L43/12 ; H01L27/22 ; B82Y25/00

Abstract:
A spin orbit torque (SOT) memory device includes a MTJ device on a SOT electrode, where a first portion of the SOT electrode extends beyond a sidewall of the MTJ by a first length that is no greater than a height of the MTJ, and where a second portion of the first electrode extends from the sidewall and under the MTJ by a second length that is no greater than a width of the MTJ. The MTJ device includes a free magnet, a fixed magnet and a tunnel barrier between the free magnet and the fixed magnet.
Public/Granted literature
- US20190304523A1 SELF-ALIGNED SPIN ORBIT TORQUE (SOT) MEMORY DEVICES AND THEIR METHODS OF FABRICATION Public/Granted day:2019-10-03
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