Invention Grant
- Patent Title: Cleaning components and methods in a plating system
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Application No.: US16386646Application Date: 2019-04-17
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Publication No.: US11241718B2Publication Date: 2022-02-08
- Inventor: Joseph Antony Jonathan , Kyle M. Hanson , Jason A. Rye , James E. Brown , Gregory J. Wilson , Eric J. Bergman , Tricia A. Youngbull , Timothy G. Stolt
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: C25D21/08
- IPC: C25D21/08 ; B08B1/00 ; C25D17/00

Abstract:
Systems for cleaning electroplating system components may include a seal cleaning assembly incorporated with an electroplating system. The seal cleaning assembly may include an arm pivotable between a first position and a second position. The arm may be rotatable about a central axis of the arm. The seal cleaning assembly may include a cleaning head coupled with a distal portion of the arm. The cleaning head may include a bracket having a faceplate coupled with the arm, and a housing extending from the faceplate. The housing may define one or more arcuate channels extending through the housing to a front surface of the bracket. The cleaning head may also include a rotatable cartridge extending from the housing of the bracket. The cartridge may include a mount cylinder defining one or more apertures configured to deliver a cleaning solution to a pad coupled about the mount cylinder.
Public/Granted literature
- US20190321861A1 CLEANING COMPONENTS AND METHODS IN A PLATING SYSTEM Public/Granted day:2019-10-24
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